Scanning probe microscope and operation method

Details Scanning probe microscope and operation method Scanning probe microscope and operation method

2005-09-13

2005-09-13

Larkin, Daniel S. (Department: 2856)

Measuring and testing

Surface and cutting edge testing

Roughness

C073S001890

Reexamination Certificate

active

06941798

ABSTRACT:
A scanning probe is microscope has a cantilever having a probe at a disal end thereof and an oscillator for generating a resonance signal near a resonance of the cantilever. A vibrating device receives the resonance signal as a driving signal for vibrating the cantilever. A variable gain amplifier adjusts a gain of displacement signal corresponding to displacement of the vibrating cantilever so as to satisfy the equation G=(A/A0)*G0to control a quality factor value of the cantilever resonance to an optimal quality factor value, where G represents a gain value of the variable gain amplifer, A represents a preselected oscillation amplitude of the oscillator, A0represents an initial oscillation amplitude of the oscillator, and G0represents a gain value of the variable gain amplifier when the initial oscillation amplitude of the oscillator is A0.

REFERENCES:
patent: 6005246 (1999-12-01), Kitamura et al.
patent: 6038916 (2000-03-01), Cleveland et al.
patent: 6189374 (2001-02-01), Adderton et al.

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