Scanning probe microscope and method of control error correction

Details Scanning probe microscope and method of control error correction Scanning probe microscope and method of control error correction

1993-11-04

1995-11-21

Williams, Hezron E.

Measuring and testing

Surface and cutting edge testing

Roughness

250306, G01B 528

Patent

active

054676428

ABSTRACT:
A scanning probe microscope in which the deflection of a cantilever caused by the proximity between a stylus and a sample is detected, the relative distance between the sample and a probe at which the level of the deflection detection signal coincides with a reference level is subjected to servo control thereby to control the force exerted on the stylus to a constant level, and the relative positions of the sample and the probe are scanned to produce a three-dimensional image of the surface of the sample. In order to eliminate the error of servo control attributable to the deformation of the cantilever, the deflection detection signal is held with the cantilever set in free standing state, and the signal thus held is used to correct the level of the cantilever deflection detection signal. The servo control is effected by the detection signal thus corrected.

REFERENCES:
patent: Re34489 (1993-12-01), Hansma et al.
patent: 4724318 (1988-02-01), Binnig
patent: 4935634 (1990-06-01), Hansma et al.
patent: 5038322 (1991-08-01), Van Loenen
patent: 5059793 (1991-10-01), Miyamoto et al.
patent: 5066858 (1991-11-01), Elings et al.
patent: 5144128 (1992-09-01), Hasegawa et al.
patent: 5229607 (1993-07-01), Matsui et al.
patent: 5237859 (1993-08-01), Elings et al.
patent: 5241527 (1993-08-01), Eguchi et al.
patent: 5245863 (1993-09-01), Kajimura et al.
patent: 5262643 (1993-11-01), Hammond et al.
"Control Electronics For Atomic Force Microscopy", By O. Marti et al., Review of Scientific Instruments, vol. 59, No. 6, Jun. 1988, New York, N.Y., USA, pp. 836-839.
"Proximal Probes: Techniques For Measuring At The Nanometer Scale", By J. S. Murday and R. J. Colton, Materials Science & Engineering B, vol. B6, No. 2/3, Jun. 1990, Lausanne, CH, pp. 77-85.
"A High Stability And Low Drift Atomic Force Microscope", By H. J. Hug et al., Review of Scientific Instruments, vol. 63, No. 8, Aug. 1992, New York, N.Y., USA, pp. 3900-3904.
Gould et al., "From Atoms to Integrated Circuits Chips, Blood Cells, and Bacteria with the Atomic Force Microscope", J. Vac. Sci. Technol., A8 (1), Jan./Feb. 1990, pp. 369-373.
Mamin et al., "Theromechanical Writing with an Atomic Force Microscope Tip", Appl. Phys. Lett., 61(8), 24 Aug. 1992, pp. 1003-1005.

Affiliated with

Also associated with

Rating

Scanning probe microscope and method of control error correction does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Scanning probe microscope and method of control error correction, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Scanning probe microscope and method of control error correction will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-1129813