Scanning-probe techniques or apparatus; applications of scanning – Scanning or positioning arrangements – i.e. – arrangements for... – Fine scanning or positioning
Reexamination Certificate
2011-07-05
2011-07-05
Berman, Jack I (Department: 2881)
Scanning-probe techniques or apparatus; applications of scanning
Scanning or positioning arrangements, i.e., arrangements for...
Fine scanning or positioning
C850S001000, C310S316010, C318S135000, C318S560000, C318S632000
Reexamination Certificate
active
07975314
ABSTRACT:
There is provided a scanning probe microscope that allows active damping to be advantageously carried out.A Z scan control section functions as a driving control section to control a Z scanner that is a controlled object. Driving control is performed by supplying the controlled object with a driving signal processed by an adjustment function. The adjustment function adjusts the driving signal by using a simulated transfer function that simulates an actual transfer function indicative of an actual frequency characteristic of the controlled object so that executing processing of the simulated transfer function on the adjusted driving signal results in decrease of vibration of an output signal from the simulated transfer function. The adjustment function processing is configured so as to execute processing of the simulated transfer function G(s) on the driving signal, to execute processing of an inverse target transfer function K(s) corresponding to the inverse of the target transfer function on an output from the G(s), to determine the difference between the driving signal and the output of K(s), to apply a gain g to the difference, and to add the signal after the gain is applied to the driving signal. Therefore, the output from the G(s) approximates to the target transfer function which is the inverse of the K(s).
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Kodera; “Active Damping of the scanner for high-speed atomic force microscopy”, Review of Scientific Instruments. May 2005, vol. 76, No. 5.
International Search Report for PCT/JP2007/064731 , Oct. 19, 2007.
Berman Jack I
National University Corporation Kanazawa University
Pearne & Gordon LLP
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