Scanning probe microscope

Details Scanning probe microscope Scanning probe microscope

1998-04-13

1999-11-16

Larkin, Daniel S.

Measuring and testing

Surface and cutting edge testing

Roughness

250306, G01B 734

Patent

active

059837136

ABSTRACT:
Scanning signals SX and SY produced from a scanning signal-generating portion are directly supplied to a VCM driver amplifier without being attenuated according to the magnification factor. A magnification-setting portion sets the VCM driver amplifier at a magnification factor. A PI control signal produced from a PI control portion is directly supplied to a VCM driver amplifier without being attenuated according to the magnification factor.

REFERENCES:
patent: 5436448 (1995-07-01), Hosaka et al.
patent: 5623295 (1997-04-01), Kishi et al.
patent: 5631410 (1997-05-01), Kitamura
patent: 5805448 (1998-09-01), Lindsay et al.

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