Scanning probe microscope

Details Scanning probe microscope Scanning probe microscope

2007-10-23

2007-10-23

Larkin, Daniel S. (Department: 2856)

Measuring and testing

Surface and cutting edge testing

Roughness

Reexamination Certificate

active

11076250

ABSTRACT:
A scanning probe microscope has a cantilever having a minute probe on a distal end thereof and a displacement detecting device for detecting displacement of the cantilever. A Z-axis controlling amount calculating mechanism calculates a controlling amount for keeping constant a displacement amount of the cantilever. A Z-axis driving mechanism drives in a Z direction the cantilever or a sample in accordance with the controlling amount from the Z-axis controlling amount calculating mechanism. An XY scanning mechanism relatively moves the probe in a direction of an XY plane with respect to the sample to measure an uneven shape and/or a physical characteristic of the surface of the sample. A controlling range limiting device limits a driving range of the Z-axis driving mechanism. A controlling range setting device optionally sets the driving range of the Z-axis driving mechanism.

REFERENCES:
patent: 5467642 (1995-11-01), Hosaka et al.
patent: 6520005 (2003-02-01), McWaid et al.

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