Scanning probe microscope

Details Scanning probe microscope Scanning probe microscope

2007-10-09

2007-10-09

Raevis, Robert (Department: 2856)

Measuring and testing

Surface and cutting edge testing

Roughness

Reexamination Certificate

active

10957413

ABSTRACT:
The present invention is intended to solve the problem that the tip of the probe of a scanning probe microscope cannot be conditioned stably due to overload in a contact region. This problem is solved by a scanning probe microscope for scanning the probe and a sample relative to each other. The microscope has a cantilever, a vibration means for vibrating the cantilever, and a vibration signal-switching means for switching a vibration signal applied to the vibration means between at least two different signals. The cantilever has a resilient body that supports the probe.

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Tetsuya Minobe et al., “Distance dependence of noncontact-AFM image contrast onSi(111)√3×√3 -Ag structure”,Applied Surface Science, 140, 1999, pp. 298-303.

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