Scanning probe microscope

Details Scanning probe microscope Scanning probe microscope

2005-06-14

2005-06-14

Larkin, Daniel S. (Department: 2856)

Measuring and testing

Surface and cutting edge testing

Roughness

Reexamination Certificate

active

06904791

ABSTRACT:
A scanning probe microscope simply and accurately confirms whether or not a sample shape satisfies specified conditions. A pseudo reference image Sref1comprises a pair of reference line profiles Lref1and Lref2arranged apart from each other in parallel. An operator moves and rotates the position of the pseudo reference image Sref1on a screen so that a sample shape line profile fits between the reference line profiles Lref1and Lref2of the pseudo reference image Sref1. If it is possible to fit the line profile of the sample shape between the reference line profiles Lref1and Lref2, it is determined that the sample shape is in spec, while if it is not possible to fit the line profile of the sample shape between the reference line profiles Lref1and Lref2, no matter how the pseudo reference image Sref1is moved and rotated, it is determined that the sample shape is out of spec.

REFERENCES:
patent: 5750990 (1998-05-01), Mizuno et al.
patent: 5898106 (1999-04-01), Babcock et al.
patent: 6622547 (2003-09-01), Phan et al.
patent: 6661004 (2003-12-01), Aumond et al.

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