Scanning probe microscope

Details Scanning probe microscope Scanning probe microscope

2011-08-16

2011-08-16

Larkin, Daniel S (Department: 2856)

Measuring and testing

Surface and cutting edge testing

Roughness

Reexamination Certificate

active

07997124

ABSTRACT:
A scanning probe microscope has a cantilever mounted to undergo oscillation movement over a surface of a sample. The cantilever has a probe on a distal end thereof. A Z-axis controlling amount calculating mechanism calculates a controlling amount for keeping constant an oscillation amount of the cantilever. A Z-axis driving mechanism drives in a Z direction the cantilever or the sample in accordance with the controlling amount from the Z-axis controlling amount calculating mechanism. A driving range limiting device limits a driving range of the Z-axis driving mechanism. A driving range setting device optionally sets the driving range of the Z-axis driving mechanism.

REFERENCES:
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patent: 7284415 (2007-10-01), Shikakura et al.
patent: 7373806 (2008-05-01), Kitajima et al.
patent: 7631546 (2009-12-01), Masser

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