Measuring and testing – Surface and cutting edge testing – Roughness
Patent
1996-05-31
1999-01-12
Noland, Thomas P.
Measuring and testing
Surface and cutting edge testing
Roughness
250306, G01B 1130
Patent
active
058593640
ABSTRACT:
A slide glass with a sample rested thereon is placed on an interior total reflection prism with a matching oil between them. A laser beam is applied through a prism to the sample, and evanescent light is generated on the sample surface. Above the sample, a probe supported at a free end of a cantilever is located, and an objective is provided above the probe. The objective has an angular aperture exceeding a vertical angle of the probe, where the angular aperture indicates an angle from a focal point of the objective to a diameter of entrance pupil. A scattering light detection lens barrel is provided above the objective, and cooperates with the objective to constitute a scattering light detection optical system. The optical system detects scattering light generated when the probe is introduced to the evanescent light.
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Konada Takeshi
Toda Akitoshi
Noland Thomas P.
Olympus Optical Co,. Ltd.
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