Scanning probe microscope

Details Scanning probe microscope Scanning probe microscope

1997-04-29

1998-06-02

Williams, Hezron E.

Measuring and testing

Moisture content or absorption characteristic of material

G01B 528

Patent

active

057603006

ABSTRACT:
A probing apparatus having an elastic body supported by a support and provided with a probe at its free end. The elastic body is disposed in a solution in which a sample is held. The elastic body is forcibly oscillated at its natural frequency by a driving source. A displacement detecting device detects a variation in the oscillation state of the elastic body which takes place when the tip of the probe is placed in the vicinity of the surface of the sample. The detected output from the displacement detecting device is fed to a sample data monitor device to provide a topographic image thereon.

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