Scanning probe characterization of surfaces

Details Scanning probe characterization of surfaces Scanning probe characterization of surfaces

2006-03-15

2008-09-02

Souw, Bernard E (Department: 2881)

Nanotechnology

Manufacture, treatment, or detection of nanostructure

With scanning probe

C977S849000, C977S854000, C977S860000, C977S861000, C977S862000, C977S863000, C977S864000, C250S306000, C250S307000, C250S310000, C324S456000, C324S690000, C324S754090

Reexamination Certificate

active

07420106

ABSTRACT:
Characterizing dielectric surfaces by detecting electron tunneling. An apparatus includes an atomic force probe. A mechanical actuator is connected to the atomic force probe. A mechanical modulator is connected to the mechanical actuator. The mechanical modulator modulates the mechanical actuator and the atomic force probe at the resonant frequency of the atomic force probe. An electrical modulator is connected to the atomic force probe. A feedback sensing circuit is connected to the mechanical modulator to detect movement of the atomic force probe and provide information about the movement of the atomic force probe to the mechanical modulator allowing the mechanical modulator to modulate the atomic force probe at the resonant frequency of the atomic force probe as the resonant frequency of the atomic force probe changes. An FM detector is connected to the feedback circuit detects changes in the resonant frequency of the atomic force probe.

REFERENCES:
patent: 5267471 (1993-12-01), Abraham et al.
patent: 5317141 (1994-05-01), Thomas
patent: 5329514 (1994-07-01), Eguchi et al.
patent: 5412597 (1995-05-01), Miyazaki et al.
patent: 5438206 (1995-08-01), Yokoyama et al.
patent: 5481528 (1996-01-01), Eguchi et al.
patent: 5520769 (1996-05-01), Barrett et al.
patent: 5535185 (1996-07-01), Kishi et al.
patent: 5623476 (1997-04-01), Eguchi et al.
patent: 5723982 (1998-03-01), Yasue et al.
patent: 5744704 (1998-04-01), Hu et al.
patent: 5880360 (1999-03-01), Hu et al.
patent: 6094971 (2000-08-01), Edwards et al.
patent: 6268604 (2001-07-01), Boyadzhyan-Sevak
patent: 6369385 (2002-04-01), Muray et al.
patent: 6466039 (2002-10-01), Gruverman
patent: 6477132 (2002-11-01), Azuma et al.
patent: 6583412 (2003-06-01), Williams
patent: 6776030 (2004-08-01), Kirpichnikov et al.
patent: 7002149 (2006-02-01), Shigekawa et al.
patent: 2002/0178802 (2002-12-01), Ookubo
patent: 2004/0129064 (2004-07-01), Hinterdorfer et al.
patent: 2006/0225164 (2006-10-01), Williams et al.
patent: 2007/0194225 (2007-08-01), Zorn
Binning et al., “Atomic Force Microscope”, Phy. Rev. Lett. 56 (9) 1986, 960-933.
Sadewasser et al., “Integrated Tunneling Sensor for Nanoelectromechanical Systems”, Appl. Phys. Lett. 89, 2006, 173101.
Kenny et al., “Micromachined electron tunneling infrared sensors”, Solid-State Sensor and Actuator Workshop, 1992, 5thTechnical Digest., IEEE, Jun. 22-25, 1992.
Marti et al., “Atomic force microscopy and scanning tunneling microscopy with a combination atomic force microscope/scanning tunneling microscope”, J. Vac. Sci. Technol. A 6 (3) 1988, 2089-2092.
Romain Stomp, Yoichi Miyahara, Scha Schaer, Qingfeng Sun, Hong Guo, and Peter Grutter, Sergei Studenikin, Philip Poole, and Andy Sachrajda Physical Review Letters “Detection of Single-Electron Charging in an Individual InAs Quantum Dot by Noncontact Atomic-Force Microscopy” pp. 056802-1 to 056802-4 Feb. 11, 2005 The American Physical Society, 4 pages.
Michael T. Woodside and Paul L. McEuen “Scanned probe imaging of single-electron charge states in nanotube quantum dots”, 5 pages.
Applied Physics Letters 87, 242102 (2005) J. Zhu, M. Brink, and P.L. McEuen “Frequency shift imaging of quantum dots with single-electron resolution”, 3 pages 2005 American Institute of Physics.
Institute of Physics Publishing Nanotechnology Aykutlu Dana Yoshihisa Yamamoto “Electrostatic force spectroscopy of near surface localized states”, 9 pages 2005 IOP Publishing Ltd.

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