Scanning probe apparatus and drive stage therefor

Details Scanning probe apparatus and drive stage therefor Scanning probe apparatus and drive stage therefor

2006-12-18

2009-12-15

Larkin, Daniel S (Department: 2856)

Measuring and testing

Surface and cutting edge testing

Roughness

C850S001000, C850S006000, C850S008000, C850S033000

Reexamination Certificate

active

07631547

ABSTRACT:
A scanning probe apparatus for obtaining information of a sample or processing the sample with relative movement between the sample and the apparatus includes a sample stage for holding the sample, and a drive stage with a probe, a cantilever supporting the probe, a cantilever holding member for holding the cantilever, and a drive element for driving the probe in three directions perpendicular to each other. In addition, a movable portion surrounds the drive element and is positioned outside of the drive element, with the movable portion movable in a direction in which an inertial force generated during movement of the probe is canceled. The drive stage includes an optical path, through which light passes, provided inside of the drive stage.

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Japanese Office Action dated Jan. 6, 2009, in corresponding Japanese Patent Application No. 2005-370094 (with excerpt English translation).

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