Optical: systems and elements – Lens – With graded refractive index
Reexamination Certificate
2006-05-09
2006-05-09
Turner, Samuel A. (Department: 2877)
Optical: systems and elements
Lens
With graded refractive index
C250S216000, C250S234000, C250S227110, C359S664000
Reexamination Certificate
active
07042647
ABSTRACT:
A scanned optical system for use in optical probing applications provides a large Field of View (FOV) for objective lenses having high Numerical Aperture (NA), such as Solid Immersion Lenses (SIL's). This enables high resolution imaging of semiconductor devices for such applications as laser probing, TIVA/LIVA, OBIRCH, and photon emission timing analysis. A hybrid scanning optics configuration is disclosed to provide high resolution imaging over a small area along with low resolution imaging over a large area.
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Credence Systems Corporation
Nguyen Sang H.
Turner Samuel A.
Wenocur Deborah W.
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