Scanning optical microscope with position detection grating

Details Scanning optical microscope with position detection grating Scanning optical microscope with position detection grating

1988-07-15

1989-08-29

Nelms, David C.

Radiant energy

Photocells; circuits and apparatus

Optical or pre-photocell system

250237G, H01J 314

Patent

active

048619825

ABSTRACT:
A beam splitter (120) arranged in the radiation path of the scanning beam splits off a reference beam synchronously moving with the scanning spot (21) to a reference plane (140). The movement of the scanning spot (21) can be checked by measuring, with the aid of a radiation detector (160), the movement of a reference spot (121) formed by the reference beam in the reference plane. In this way an accurate determination of the position of the scanning spot (21) is possible while using simple beam-deflecting elements (40,42) having a relatively low accuracy. A cylindrical lens (131) gives the scanning spot the shape of a line, so that sensitivity to dust and other contaminations on the reference plane is reduced considerably.

REFERENCES:
patent: 4667099 (1987-05-01), Arai et al.
patent: 4775788 (1988-10-01), Harshberger et al.

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