Scanning optical microscope using single laser beam

Details Scanning optical microscope using single laser beam Scanning optical microscope using single laser beam

1987-07-20

1989-10-10

Nelms, David C.

Radiant energy

Photocells; circuits and apparatus

Optical or pre-photocell system

350358, G02F 111

Patent

active

048734349

ABSTRACT:
A scanning optical microscope which comprises a source of optical radiation and means for focussing radiation from the source into an interrogating spot on a surface under examination. The spot is deflected about a point on the surface, and the surface topography is measured by measuring the amplitude and/or phase of the radiation reflected from the surface at the spot position.

REFERENCES:
patent: 3531184 (1970-09-01), Adler
patent: 3796495 (1974-03-01), Laub
patent: 4455485 (1984-06-01), Hosaka et al.

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