Scanning optical equipment

Details Scanning optical equipment Scanning optical equipment

1990-04-27

1994-02-01

Sugarman, Scott J.

Optical: systems and elements

Deflection using a moving element

Using a periodically moving element

359212, 2502012, G02B 2608

Patent

active

052836819

ABSTRACT:
A scanning optical equipment provided with the means to detect scanning beam spot at more than two points of the scanned surface and the means to enable direct observation of the state of focussing of the beam spot, thus enabling extremely precise control of the state of focussing and forming an extremely high density image which could not be obtained by the conventional methods.

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patent: 4314154 (1982-02-01), Mimoura et al.
patent: 4321700 (1982-03-01), Rusell
patent: 4350988 (1982-09-01), Masegi
patent: 4834520 (1989-05-01), Klainman
patent: 4918306 (1990-04-01), Saito
patent: 4990771 (1991-02-01), Mimoura et al.
patent: 5083140 (1992-01-01), Peterson et al.
patent: 5095319 (1992-03-01), Watarai et al.
patent: 5103091 (1992-04-01), Hirose et al.

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