Scanning microscope employing improved scanning mechanism

Details Scanning microscope employing improved scanning mechanism Scanning microscope employing improved scanning mechanism

1992-07-09

1993-07-06

Bovernick, Rodney B.

Optical: systems and elements

Deflection using a moving element

Using a periodically moving element

250236, 359201, 359213, 359368, G02B 2610

Patent

active

052259234

ABSTRACT:
A confocal microscope (10) includes a scanner assembly (38) in which the x-axis deflector assembly includes two resonant scanners (50 and 52) that oscillate about parallel axes at different frequencies, one of which is a harmonic of the other. As a consequence, the x-axis scan can be nearly linear even though it is provided resonantly and thus benefits from the high-speed capabilities of resonant systems. A galvanometer (64) pivots the housing of one of the resonant scanners (50) about its axis so as to provide x-axis panning.

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Montagu, Jean I., "Tunable Resonant Scanners", Proceedings of SPIE--The International Society for Optical Engineering, vol. 817, Aug. 20-21, 1987.

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