Scanning microscope and scanning mechanism for the same

Details Scanning microscope and scanning mechanism for the same Scanning microscope and scanning mechanism for the same

1990-09-24

1992-01-14

Nelms, David C.

Radiant energy

Photocells; circuits and apparatus

Optical or pre-photocell system

359368, H01J 314, H01J 516, H01J 4014

Patent

active

050813501

ABSTRACT:
A confocal scanning microscope comprises a sample supporting member on which a sample is supported, and a light source which produces a light beam. A light projecting device forms an image of the light beam as a small light spot on the sample. A light receiving device condenses the light beam, which has been radiated out of the sample, and forms an image of the condensed light beam as a point image. A photodetector detects the point image. A movable member supports the light projecting device and the light receiving device. A main scanning device reciprocally moves the movable member such that the light spot scans the sample in main scanning directions. A sub-scanning device moves the sample supporting member with respect to the movable member in sub-scanning directions, which are normal to the main scanning directions, and at a speed lower than the speed at which the light spot scans the sample in the main scanning directions, whereby the sample is scanned with the light spot in the sub-scanning directions.

REFERENCES:
patent: 4863226 (1989-09-01), Houpt et al.
patent: 4893008 (1990-01-01), Horikawa
patent: 4897537 (1990-01-01), Miyamoto et al.
patent: 5032720 (1991-07-01), White
patent: 5035476 (1991-07-01), Ellis et al.

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