Scanning micromechanical probe control system

Electricity: motive power systems – Positional servo systems – Adaptive or optimizing systems including 'bang-bang' servos

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318603, 318573, 318571, 250306, 219 6918, G05B 1300

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active

049528572

ABSTRACT:
The scanning micromechanical probe control system for controlling relative movement between a sensor probe and an adjacent sample surface includes a sensor probe for measuring a parameter which varies relative to the relative positioning of the probe and the adjacent surface adapted to generate an error signal indicating one of at least two discrete position conditions; an up/down counter for integrating the error signal and for generating an up/down count signal; and a position control servo for controlling the relative positioning of the probe and the surface responsive to the up/down count signal. An adaptive feedback control most preferably controls the rate of up/down positioning of the sensor probe and the rate of raster scanning of the probe relative to the target surface.

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patent: 4254368 (1981-03-01), Ido et al.
patent: 4287461 (1981-09-01), Promis et al.
patent: 4458190 (1984-07-01), Takawashi et al.
patent: 4521660 (1985-06-01), Inoue
patent: 4750104 (1988-06-01), Kumamoto et al.
patent: 4806755 (1989-02-01), Duerig et al.

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