Scanning micro-elements for optical systems

Details Scanning micro-elements for optical systems Scanning micro-elements for optical systems

1996-07-10

1998-10-06

Phan, James

Optical: systems and elements

Deflection using a moving element

By moving a reflective element

359201, 359223, 359230, G02B 2608

Patent

active

058186239

ABSTRACT:
This invention relates to a scanning micro-element for an optical system, characterized in that it comprises:
a substrate (12),
a membrane (14, 16) made of a dielectric material deposited on a substrate surface, the membrane defining two planes making a non-zero angle .alpha. between them, part (14) of the membrane including a reflecting area (20) capable of being deflected along at least a first direction above a cavity formed in the substrate,
means (22, 24, 26, 28) to deflect this part of the membrane along at least one direction.

REFERENCES:
patent: 5281887 (1994-01-01), Engle
patent: 5625483 (1997-04-01), Swartz
IBM Technical Disclosure Bulletin, vol. 20, No. 1, pp. 355-356, Jun. 1977, "Micromechanical Light Deflector Array".
IBM Technical Disclosure Bulletin, vol. 22, No. 12, pp. 5575-5577, May 1980, "Color Projection Display System Using Silicon Micromechanics".
SPIE Miniature and Micro-Optics and Micromechanics, vol. 1992, pp. 32-39, 1993, Hiroshi Goto, "High Performance Micro Photonic Devices with Micro Atuator".
Solid State Technology, pp. 63-68, Jul. 1994, Michael A. Mignardi, "Digital Micromirror Array for Projection TV".

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