Scanning mechanism, method of machining workpiece, and...

Details Scanning mechanism, method of machining workpiece, and... Scanning mechanism, method of machining workpiece, and...

2008-02-13

2009-08-04

Phan, James (Department: 2872)

Optical: systems and elements

Deflection using a moving element

Using a periodically moving element

C359S209100

Reexamination Certificate

active

07570407

ABSTRACT:
A scanning mechanism that scans a scanning object with a light beam has light-collecting means for collecting the light beam that is emitted by a light source; driving means for driving the light-collecting means in a direction orthogonal to an optical axis of the light-collecting means; first reflecting means provided near a first side of the scanning object, for reflecting the light beam collected by the light-collecting means to allow the light beam to be incident on the scanning object; and second reflecting means provided near a second side of the scanning object that is opposite to the first side of the scanning object, for reflecting the light beam collected by the light-collecting means to allow the light beam to be incident on the scanning object.

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patent: WO 97/48519 (1997-12-01), None

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