Scanning measurement instrument

Details Scanning measurement instrument Scanning measurement instrument

2011-06-07

2011-06-07

Wells, Nikita (Department: 2881)

Scanning-probe techniques or apparatus; applications of scanning

Particular type of scanning probe microscopy or microscope;...

C850S010000, C850S062000, C850S038000, C702S150000

Reexamination Certificate

active

07958564

ABSTRACT:
A scanning measurement instrument is capable of simultaneously achieving both higher accuracy and higher speed in autonomous scanning measurement. The instrument includes a path information holding unit for holding information about the path of the center position of a tip of a scanning probe at past tip center positions with respect to the current tip center position during autonomous scanning measurement performed with the scanning probe; a path reference direction setting unit for setting an approximate straight line direction of the path as a path reference direction; a traveling direction setting unit for setting the path reference direction as a traveling direction; a movement control unit for controlling a moving unit such that the scanning probe is moved in the traveling direction; and a normal direction setting unit for setting the normal direction of a measurement surface according to the traveling direction.

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