Photocopying – Projection printing and copying cameras – Step and repeat
Patent
1995-03-22
1998-09-29
Pendegrass, Joan H.
Photocopying
Projection printing and copying cameras
Step and repeat
355 52, 355 60, 355 65, 355 71, G03B 2742, G03B 2768, G03B 2770
Patent
active
058152458
ABSTRACT:
A small field scanning photolithography system uses opposing motion of a reticle and a blank to compensate for image reversal by a projection system such as a conventional Wynne-Dyson optical system which forms a reverted image on a blank. The reticle has a reverted pattern. During scanning, the reticle moves along a reverted axis in a direction opposite the direction in which the blank moves. The opposing motions can either expose a stripe on the blank or index the reticle and blank for exposure of a next stripe. In one embodiment of the invention, the reticle and blank are on independently movable precision air bearing stages. Typically, the blank and reticle move together perpendicular the reverted axis and in opposite direction along the reverted axis. The stages can move the reticle and blank different amounts to correct for shrinkage and temperature changes which cause the size of the reticle and blank to differ.
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Allen Paul C.
Thomas Timothy N.
Etec Systems, Inc.
Kerner Herbert
Klivans Norman R.
Millers David T.
Pendegrass Joan H.
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