Photocopying – Projection printing and copying cameras – Step and repeat
Patent
1995-03-22
1998-05-26
Braun, Fred L.
Photocopying
Projection printing and copying cameras
Step and repeat
G03B 2742
Patent
active
057574693
ABSTRACT:
A small field scanning photolithography system has a double pass Wynne-Dyson optical system which provides an erect, non-reverted, unmagnified image. An optical path through the system passes from an object, reflects off an input reflector, passes through a first quadrant of a lens, reflects off a concave mirror, passes through a second quadrant of the lens into folding optics where an intermediate image forms, passes from the folding optics through a third quadrant of the lens, reflects off the concave mirror a second time, passes through a fourth quadrant of the lens, and finally reflects off an output reflector to a plane where a final image forms. Typically, the input and output reflectors and the folding optics are prisms. A field stop may be provided in the folding optics where the intermediate image forms. Magnification adjusting optics can be added to the input and output prisms or to the folding optics. The magnification adjusting optics forms two narrow meniscus air gaps which are equal size for unity magnification. Narrowing one air gap and widening the other air gap changes magnification slightly.
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Greed, Jr., et al., "Variable Magnification in a 1:1 Projection Lithography System," SPIE vol. 334 Optical Microlithography Technology for Mid-1980s 1982, pp. 2-9.
Braun Fred L.
Etec Systems, Inc.
Klivans Norman R.
Millers David T.
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