Scanning laser microscope with aperture alignment

Details Scanning laser microscope with aperture alignment Scanning laser microscope with aperture alignment

1986-12-15

1988-03-22

Westin, Edward P.

Radiant energy

Photocells; circuits and apparatus

Photocell controls its own optical systems

250237R, 250548, 350319, G02B 2136

Patent

active

047330635

ABSTRACT:
A confocal scanning laser microscope according to the present invention employs an aperture which is provided at a predetermined position within a plane of a photomask including rectilinear pattern edges orthogonal to each other formed on a transparent substrate. The aperture is moved in such a way that coordinate positions at which a laser beam traverses the respective rectilinear pattern edges orthogonal to each other are found using output signals from an optical detector, and it is consequently brought into agreement with a focused position of the laser beam.

REFERENCES:
patent: 4649270 (1987-03-01), Goldenberg
patent: 4652095 (1987-03-01), Mauro

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