Scanning laser beam delivery system

Details Scanning laser beam delivery system Scanning laser beam delivery system

1996-04-01

1997-08-05

Scott, Jr., Leon

Coherent light generators

Particular beam control device

Scanning

372101, 372103, H01S 310

Patent

active

056549750

ABSTRACT:
There is provided a scanning laser beam delivery system for use in pulsed laser deposition of a target evaporant (40) onto a substrate (50). The system includes a laser beam source (10) for generating a pulsed laser beam, a beam transfer assembly (20) optically coupled to laser beam source (10) for directing the generated pulse laser beam along an optical path (15) having a terminal segment (15') which impinges upon target evaporant (40); and, a control mechanism (30) coupled to beam transfer assembly (20). Beam transfer assembly (20) includes a scanning mechanism (22) for reversibly translating terminal segment (15') of optical path (15) along a scan direction substantially normal to the direction along which terminal segment (15') has a directional component. Actuation of scanning mechanism (22) is automatically controlled by control mechanism (30).

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