Optics: measuring and testing – By light interference – For dimensional measurement
Reexamination Certificate
2008-01-25
2008-12-23
Connolly, Patrick J (Department: 2877)
Optics: measuring and testing
By light interference
For dimensional measurement
C356S497000, C356S630000, C356S516000
Reexamination Certificate
active
07468799
ABSTRACT:
A method including: providing a low coherence scanning interferometry data for at least one spatial location of a sample having multiple interfaces, wherein the data is collected using a low coherence scanning interferometer having an illumination geometry and an illumination frequency spectrum, and wherein the data comprises a low coherence scanning interferometry signal having multiple regions of fringe contrast corresponding to the multiple interfaces; and determining a distance between at least one pair of interfaces based on a distance between the corresponding regions of fringe contrast and information about the illumination geometry.
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Colonna de Lega Xavier
de Groot Peter J.
Connolly Patrick J
Fish & Richardson P.C.
Zygo Corporation
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