Optics: measuring and testing – By light interference – For dimensional measurement
Reexamination Certificate
2008-01-29
2008-01-29
Connolly, Patrick (Department: 2877)
Optics: measuring and testing
By light interference
For dimensional measurement
C356S511000, C356S504000
Reexamination Certificate
active
07324210
ABSTRACT:
A method including: providing a low coherence scanning interferometry data for at least one spatial location of a sample having multiple interfaces, wherein the data is collected using a low coherence scanning interferometer having an illumination geometry and an illumination frequency spectrum, and wherein the data comprises a low coherence scanning interferometry signal having multiple regions of fringe contrast corresponding to the multiple interfaces; and determining a distance between at least one pair of interfaces based on a distance between the corresponding regions of fringe contrast and information about the illumination geometry.
REFERENCES:
patent: 4355903 (1982-10-01), Sandercock
patent: 4576479 (1986-03-01), Downs
patent: 4618262 (1986-10-01), Maydan et al.
patent: 4660980 (1987-04-01), Takabayashi et al.
patent: 4818110 (1989-04-01), Davidson
patent: 4999014 (1991-03-01), Gold et al.
patent: 5042949 (1991-08-01), Greenberg et al.
patent: 5042951 (1991-08-01), Gold et al.
patent: 5112129 (1992-05-01), Davidson et al.
patent: 5129724 (1992-07-01), Brophy et al.
patent: 5133601 (1992-07-01), Cohen et al.
patent: 5135307 (1992-08-01), de Groot et al.
patent: 5301010 (1994-04-01), Jones et al.
patent: 5398113 (1995-03-01), de Groot
patent: 5459564 (1995-10-01), Chivers
patent: 5587792 (1996-12-01), Nishizawa et al.
patent: 5589938 (1996-12-01), Deck
patent: 5602643 (1997-02-01), Barrett
patent: 5774224 (1998-06-01), Kerstens
patent: 5900633 (1999-05-01), Solomon et al.
patent: 6242739 (2001-06-01), Cherkassky
patent: 6249351 (2001-06-01), de Groot
patent: H1972 (2001-07-01), Inoue
patent: 6259521 (2001-07-01), Miller et al.
patent: 6377349 (2002-04-01), Fercher
patent: 6500591 (2002-12-01), Adams
patent: 6507405 (2003-01-01), Grek et al.
patent: 6545761 (2003-04-01), Aziz et al.
patent: 6545763 (2003-04-01), Kim et al.
patent: 6597460 (2003-07-01), Groot et al.
patent: 6636322 (2003-10-01), Terashita
patent: 6721094 (2004-04-01), Sinclair et al.
patent: 6940604 (2005-09-01), Jung et al.
patent: 2002/0135775 (2002-09-01), de Groot et al.
patent: 2002/0196450 (2002-12-01), Olszak et al.
patent: 2003/0112444 (2003-06-01), Yang et al.
patent: 2004/0085544 (2004-05-01), de Groot et al.
patent: 2004/0189999 (2004-09-01), de Groot et al.
patent: 2005/0057757 (2005-03-01), de Lega et al.
patent: 2005/0068540 (2005-03-01), de Groot et al.
patent: 2005/0073692 (2005-04-01), de Groot et al.
patent: 2005/0078318 (2005-04-01), de Groot
patent: 2005/0078319 (2005-04-01), de Groot
patent: 2005/0146727 (2005-07-01), Hill
patent: 2005/0237534 (2005-10-01), Deck
patent: 2006/0012582 (2006-01-01), de Lega
patent: 2007/0081167 (2007-04-01), de Groot et al.
patent: 2007/0097380 (2007-05-01), de Groot et al.
patent: 4108944 (1992-09-01), None
patent: 4309056 (1994-09-01), None
patent: 0 397 388 (1990-11-01), None
patent: 0 549 166 (1993-06-01), None
patent: 0 617 255 (1994-09-01), None
patent: 0 929 094 (1999-07-01), None
patent: 2385417 (2003-08-01), None
patent: 08327327 (1996-12-01), None
patent: WO 97/44633 (1997-11-01), None
patent: WO 02/082008 (2002-10-01), None
patent: WO 03/062802 (2003-07-01), None
patent: WO 2004/023071 (2004-03-01), None
C. Akcay et al., “Spectral shaping to improve the point spread function in optical coherence tomography”,Optics Letters, vol. 28 No. 20, pp. 1921-1923 (Oct. 15, 2003).
R.M.A. Azzam et al., “Reflection and Transmission of Polarized Light by Stratified Planar Structures”,Ellipsometry and Polarized Light, Elsevier Science B.V. ISBN 0 444 87016 4 (Paperback) pp. 267-363 (1987).
R.M.A. Azzam et al, “Ellipsometric function of a film-substrate system: Applications to the design of reflection-type optical devices and to ellipsometry”,Journal of the Optical Society of America, vol. 5, No. 3, pp. 252-260 (1975).
M. Bashkansky et al., “Signal Processing for Improving Field Cross-correlation Function in Optical Coherence Tomography”,Supplement to Optics&Photonics News, 9(5) (May 1998).
Berman et al., “Review of In Situ & In-line Detection for CMP Applications”,Semiconductor Fabtech—8thEdition, pp. 267-274 (1998).
A. Bosseboeuf et al., “Application of microscopic interferometry techniques in the MEMS field”,Proceedings of SPIE, vol. 5145, pp. 1-16 (2003).
M. Davidson et al., “An Application of Interference Microscopy to Integrated Circuit Inspection and metrology”,Proceedings SPIE, vol. 775, pp. 233-247 (1987).
T. Dresel et al., “Three-dimensional sensing of rough surfaces by coherence radar”,Applied Optics, vol. 31, No. 7, pp. 919-925 (Mar. 1, 1992).
J.E. Greivenkamp, “Generalized data reduction for heterodyne interferometry”,Optical Engineering., vol. 23 No. 4, pp. 350-352 (Jul./Aug. 1984).
P. de Groot, “Derivation of algorithms for phase-shifting interferometry using the concept of a data-sampling window”,Appl. Opt., 34(22), p. 4723-4730 (1995).
P. de Groot et al., “Signal modeling for modern interference microscopes”,SPIE Proceedings, 5457-4 (2004).
Peter de Groot et al., “Determination of fringe order in white-light interference microscopy”,Appl. Opt., 41(22) pp. 4571-4578 (2002).
Feke, Gilbert D. et al., “Interferometric back focal plane microellipsometry”,Applied Optics, vol. 37, No. 10, pp. 1796-1802 (Apr. 1, 1998).
P.A. Flournoy et al., “White-light interferometric thickness gauge”,Appl. Opt., 11(9), pp. 1907-1915 (1972).
G. Hausler et al., “Coherence Radar and Spectral Radar—New Tools for Dermatological Diagnosis”,Journal of Biomedical Optics, vol. 3, No. 1, pp. 21-31 (Jan. 1998).
R.D. Holmes et al., “Scanning microellipsometry for extraction of true topograpy”,Electronics Letters, vol. 31, No. 5, pp. 358-359 (Mar. 2, 1995).
Kim, Seung-Woo et al., “Thickness-profile measurement of transparent thin-film layers by white-light scanning interferometry”,Applied Optics, vol. 38, No. 28, pp. 5968-5973 (Oct. 1, 1999).
Kino, Gordon S. et al., “Mirau correlation microscope”,Applied Optics, vol. 29, No. 26, pp. 3775-3783 (Sep. 10, 1990).
Kieran G. Larkin, “Efficient nonlinear algorithm for envelope detection in white light interferometry”,Journal of the Optical Society of America A, vol. 13, No. 4, pp. 832-843 (1996).
Kujawinska, Malgorzata, “Spatial Phase Measurement Methods”,Interferogram Analysis: Digital Fringe Pattern Measurement Techniques, IOP Publishing Ltd. 1993, pp. 141-193.
Lee et al., “Profilometry with a coherence scanning microscope”,Appl. Opt., 29(26), pp. 3784-3788 (1990).
I. Lee-Bennett, “Advances in non-contacting surface metrology”,OF&T Workshop, papter OTuC1 (2004).
K. Leonhardt et al., “Micro-Ellipso-Height-Profilometry”,Optics Communications, vol. 80, No. 3, 4, pp. 205-209 (Jan. 1, 1991).
Y. Liu et al., “Common path interferometric microellipsometry”,SPIE, vol. 2782, pp. 635-645 (1996).
C.J. Morgan, “Least-Squares estimation in phase-measurement interferometry”,Optics Letters, 7(8), pp. 368-370 (1982).
Ngoi et al.; “Phase-shifting interferometry immune to vibration”,Applied Optics, vol. 40, No. 19, pp. 3211-3214 (2001).
A.V. Oppenheim et al., “10.3: The time-dependent Fourier Transform”,Discrete-Time Signal Processing, 2ndEdition, pp. 714-722 (Prentice Hall, New Jersey, 1999).
M.C. Park et al., “Direct quadratic polynomial fitting for fringe peak detection of white light scanning interferograms”,Optical Engineering, vol. 39. No. 4, pp. 952-959 (2000).
S. Pettigrand et al., “Mesures 3D de topographies et de vibrations a l'echelle (sub)micrometrique par microscopie optique interferometrique”,Proc. Club CMOI, Methodes et Techniques Optiques pour l'Industrie, (2002).
M. Pluta, “Advanced light microscopy”, vol. 3, PWN—Polish Scientific Publishers (Elsevier, Amsterdam), pp. 265-271 (1993).
W.H
Colonna de Lega Xavier
de Groot Peter J.
Connolly Patrick
Fish & Richardson P.C.
Zygo Corporation
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