Scanning interferometry

Details Scanning interferometry Scanning interferometry

2006-09-05

2006-09-05

Lee, Hwa (Andrew) (Department: 2877)

Optics: measuring and testing

By light interference

For dimensional measurement

Reexamination Certificate

active

07102761

ABSTRACT:
An interferometry method includes: imaging test light reflected from at least a first portion of a test surface to interfere with reference light on a camera and form an interference pattern, wherein the imaging defines a depth of focus for the light reflected from the test surface, and wherein the test light and reference light are derived from a common source; varying an optical path length difference between the test light and reference light over a range larger than the depth of focus, wherein the optical path length difference corresponds to a difference between a first optical path between the common source and the camera for the test light and a second optical path between the common source and the camera for the reference light; and maintaining the first portion of the test surface within the depth of focus as the optical path length difference is varied.

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D.M. Gale et al., “Linnik microscope imaging of integrated circuit structures”,Applied Optics, vol. 35, No. 1, pp. 131-146.

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