Scanning force microscope with integrated optics and cantilever

Details Scanning force microscope with integrated optics and cantilever Scanning force microscope with integrated optics and cantilever

1992-03-04

1994-03-08

Williams, Hezron E.

Measuring and testing

Surface and cutting edge testing

Roughness

250306, 250307, G01B 528, G01N 2300

Patent

active

052917754

ABSTRACT:
The scanning force microscope includes integrated optics for viewing the optical lever arm, probe and sample to be examined. The scanning force microscope includes an improved mount for the probe, which is magnetically secured to the body of the scanning force microscope, to improve ease of handling and mounting the probe assembly. In one preferred embodiment the scanning force microscope, also includes a base portion with a fluid cell for receiving a sample in a sealed gas or liquid environment.

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