Measuring and testing – Surface and cutting edge testing – Roughness
Patent
1998-05-09
2000-11-14
Larkin, Daniel S.
Measuring and testing
Surface and cutting edge testing
Roughness
G01B 528
Patent
active
061453749
ABSTRACT:
An apparatus and a process for determining resonant frequencies for a cantilever used to measure tip-to-sample distances on a scanning force microscope. The process uses a non-linear equation and does not require knowledge of the shape of the cantilever to obtain the measured forces. As the tip-to-sample distance varies, the resonant frequency of the cantilever changes. Instead of measuring the positions of the tip and sample and the spring constant (k) of the cantilever, the present invention measures the resonant frequency at each data point. The shifts in frequencies contain the information necessary to reconstruct the force-distance curve.
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Eppell Steven Joseph
Zypman Niechonski Fredy Ruben
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