Scanning force microscope with detector probe for the atomic res

Details Scanning force microscope with detector probe for the atomic res Scanning force microscope with detector probe for the atomic res

1996-06-24

1998-02-03

Turner, Samuel A.

Optics: measuring and testing

By particle light scattering

With photocell detection

356357, G01B 902

Patent

active

057150540

ABSTRACT:
In a scanning probe microscope for the atomic resolution of the surface structure of an object wherein a detector probe is supported on a sensor head by a probe holder so as to be movable relative to the surface of an object to be scanned, the sensor head includes a first light conductor with an end face disposed opposite the detector probe and a second light conductor having an end face disposed opposite the object surface and an interferometer is connected to each light conductor for determining the distance between the first light conductor and the detector probe and, respectively, between the second light conductor and the object surface and an indicating instrument is provided which indicates the combined signal in such a way that the structure of said object surface is given independently of changes in distance between the sensor head and the object.

REFERENCES:
patent: 5206702 (1993-04-01), Kato et al.
patent: 5227857 (1993-07-01), Kersey
"Surace Profilometer With Ultra-High Resolution", IBM Technical Discloaure Bulletin, vol. 35, No. 3, Aug., 1992.
M.J. Offside, et al., "Interferometric Scanning Optical Microscope For Surface Characterization", Applied Optics, vol. 31, No. 31, Nov., 1992.
M. Nonnenmacher, "Force Microscopy With Actively Stabilized Differential Fiber Detection Mechanism", Journal of Vacuum Science & Technology, Jul./Aug. 1993, No. 4, Part 1.

Affiliated with

Also associated with

Rating

Scanning force microscope with detector probe for the atomic res does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Scanning force microscope with detector probe for the atomic res, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Scanning force microscope with detector probe for the atomic res will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-667461