Scanning force microscope with automatic surface engagement and

Details Scanning force microscope with automatic surface engagement and Scanning force microscope with automatic surface engagement and

1998-05-04

2000-06-27

Larkin, Daniel S.

Measuring and testing

Surface and cutting edge testing

Roughness

G01B 528, G01B 734

Patent

active

06079254&

ABSTRACT:
The vibrating probe of a scanning force microscope is brought into engagement with a sample surface in an initial approach process moving the probe toward the sample surface until the amplitude of probe vibration at an excitation frequency is measurably affected by forces between the tip and the sample, and then in a final approach process in which a change in vibration amplitude caused by a dithering vibration superimposed on the excitation vibration exceeds a pre-determined threshold limit. The excitation frequency is reduced if the phase angle of vibrations exceeds another limit, and the amplitude of the excitation driving function is increased as the amplitude or tip vibration falls below a setpoint. During approach and scanning, vibration amplitude is measured through a demodulator having an intermediate reference signal locked in phase with the tip motion signal.

REFERENCES:
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patent: 5262643 (1993-11-01), Hammond et al.
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patent: 5517128 (1996-05-01), Henninger
patent: 5589686 (1996-12-01), Ohara
patent: 5625142 (1997-04-01), Gamble
patent: 5631410 (1997-05-01), Kitamura
patent: 5907096 (1999-05-01), Chen
Multifunction Non-Contact Stylus Microscope, IBM Technical Disclosure Bulletin, vol. 32, No. 88 Jan., 1990, pp. 39-40.
Fast Image Acquisition with Scanning Tunneling Microscope or Atomic Force Microscope, IBM Technical Disclosure Bulletin, vol. 36, No. 03, Mar., 1993, pp. 93-94.
Automatic Approach System in an Atomic Force Microscope for Bringing the Tip Very Clsoe to the Sample, IBM Technical Disclosure Bulletin, vol. 37, No. 10, Oct., 1994, p. 635.

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