Radiant energy – Luminophor irradiation
Patent
1996-11-07
1998-01-06
Wong, Don
Radiant energy
Luminophor irradiation
2504591, 2504611, F21V 916
Patent
active
057058210
ABSTRACT:
A scanning fluorescent microthermal imaging (FMI) apparatus and method is disclosed, useful for integrated circuit (IC) failure analysis, that uses a scanned and focused beam from a laser to excite a thin fluorescent film disposed over the surface of the IC. By collecting fluorescent radiation from the film, and performing point-by-point data collection with a single-point photodetector, a thermal map of the IC is formed to measure any localized heating associated with defects in the IC.
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Barton Daniel L.
Tangyunyong Paiboon
Sandia Corporation
Wong Don
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