Scanning fluorescent microthermal imaging apparatus and method

Radiant energy – Luminophor irradiation

Patent

Rate now

  [ 0.00 ] – not rated yet Voters 0   Comments 0

Details

2504591, 2504611, F21V 916

Patent

active

057058210

ABSTRACT:
A scanning fluorescent microthermal imaging (FMI) apparatus and method is disclosed, useful for integrated circuit (IC) failure analysis, that uses a scanned and focused beam from a laser to excite a thin fluorescent film disposed over the surface of the IC. By collecting fluorescent radiation from the film, and performing point-by-point data collection with a single-point photodetector, a thermal map of the IC is formed to measure any localized heating associated with defects in the IC.

REFERENCES:
patent: 4455741 (1984-06-01), Kolodner
patent: 4819658 (1989-04-01), Kolodner
patent: 5149972 (1992-09-01), Fye et al.
patent: 5272330 (1993-12-01), Betzig et al.
patent: 5286971 (1994-02-01), Betzig et al.
patent: 5288997 (1994-02-01), Betzig et al.
patent: 5288998 (1994-02-01), Betzig et al.
patent: 5288999 (1994-02-01), Betzig et al.
patent: 5304809 (1994-04-01), Wickersheim
Daniel L. Barton, "Fluorescent Microthermographic Imaging, " Proceedings of the 20th ISTFA, pp. 87-95, (1994).
Paibon Tangyunyong and Daniel L. Barton, "Photon Statistics, Film Preparation and Characteristics in Fluorescent Microthermal Imaging," Proceedings of the ISTFA, 1995.
Paul Kolodner and J. Anthony Tyson, "Remote Thermal Imaging with 0.7.mu.m Spatial Resolution Using Temperature-Dependent Fluorescent Thin Films," Appl. Phys. Lett. 42 (1), pp. 117-119, (1 Jan. 1983).
Paul Kolodner and J. Anthony Tyson, "Microscopic Fluorescent Imaging of Surfaces Temperature Profiles With 0.01 .degree.C Resolution," Appl. Phys. Lett. 40 (9), pp. 782-784, (1 May 92).
Barnes Infrared Radiometric Microscope Model RM-2A Instruction Manual (Barnes Engineering Co., Stamford, CT) undated.
Barnes Infrared Micro Imager Model RM-50 (Barnes Engineering Co., Stamford, CT) undated.
C. T. Elliot, D. Day, and D. J. Wilson, "An Integrating Detector for Serial Scan Thermal Imaging," Infrared Physics, vol. 22, pp. 31-42 (1982).
D. Pote, G. Thome, and T. Guthrie, "An Overview of Infrared Thermal Imaging Techniques in the Reliabilty and Failure Analysis fo Power Transistors," Proceddings of the International Society for Testing and Failure Analysis (ISTFA), pp. 63-75 (1988).
G. J. Zissis, "Infrared Technology Fundamentals," Optical Engineering, vol. 15, No. 6, pp. 484-497 (1976).
J. Hiatt, "A Method fo Detecting Hot Spots on Semiconductors Using Liquid Crystals," Proceedings of the International Reliability Physics Symposium (IRPS), pp. 130-133 (1981).
A. Geol and A. Gray, "Liquid Crystal Technique as a Failure Analysis Tool," Proceedings of the International Reliabilty Physics Symposium (IRPS), p. 115 (1980).
H. Winston, O.J. Marsh, C.K. Suzuki, and C. I. Telk, "Fluorescence of Europium Thenoyltrifluoroacetonate, I. Evaluation of Laser Threshold Parameters," Journal of Chemical Physics, vol. 39, pp. 267-270 (15 Jul. 1963).
M. Bhaumik, "Quenching and Temperature Dependence of Fluorescence in Rare-Earth Chelates," Journal of Chemistry Physics, vol. 40, pp. 3711-3715 (15 Jun. 1964).
G. Crosby, R. Whan, and R. Aliere, "Intramolecular Energy Transfer in Rare Earth Chelates: Role of the Triplet State,"Journal of Chemical Physics, vol. 34, pp. 743-748 (Mar. 1961).
E. J. Bowen and J. Sahu, "The Effect of Temperature on Fluorescence of Solutions," Journal of Physical Chemistry, vol. 63, pp. 4-7 (1959).

LandOfFree

Say what you really think

Search LandOfFree.com for the USA inventors and patents. Rate them and share your experience with other people.

Rating

Scanning fluorescent microthermal imaging apparatus and method does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Scanning fluorescent microthermal imaging apparatus and method, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Scanning fluorescent microthermal imaging apparatus and method will most certainly appreciate the feedback.

Rate now

     

Profile ID: LFUS-PAI-O-2331501

  Search
All data on this website is collected from public sources. Our data reflects the most accurate information available at the time of publication.