Scanning exposure method and apparatus for controlling accelerat

Details Scanning exposure method and apparatus for controlling accelerat Scanning exposure method and apparatus for controlling accelerat

1997-09-23

2000-03-21

Gray, David M.

Photocopying

Projection printing and copying cameras

Step and repeat

355 67, 355 71, G03B 2742, G03B 2754, G03B 2772

Patent

active

060408936

ABSTRACT:
A scanning exposure apparatus for projecting a portion of a pattern of an original onto a substrate in a slit-like shape through a projection optical system and for scanningly moving the original and the substrate perpendicular to an optical axis of the projection optical system, to thereby print the pattern of the original on the substrate. The apparatus includes a masking device for restricting an exposure area on the original, a drive device for moving the masking device in accordance with a scan of the original and the substrate and a controller for controlling the drive device so that acceleration of the masking device is completed before a start of the exposure and for initiating deceleration of the masking device after completion of the exposure.

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