Scanning exposure method and apparatus

Details Scanning exposure method and apparatus Scanning exposure method and apparatus

1997-09-11

2000-05-30

Metjahic, Safet

Photocopying

Projection printing and copying cameras

Step and repeat

355 67, G03B 2742, G03B 2754

Patent

active

060696834

ABSTRACT:
An exposure apparatus includes a projection optical system for projecting a pattern of an original onto a substrate, an original stage for moving the original relative to the projection optical system, a substrate stage for moving the substrate relative to the projection optical system, an alignment detecting system for detecting alignment information related to alignment of at least one of the original and the substrate, a correcting device for correcting the alignment information detected by the alignment detecting system, on the basis of the position of the original stage, and a controller for controlling alignment of at least one of the original and the substrate on the basis of the alignment information as corrected by the correcting device.

REFERENCES:
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patent: 5194893 (1993-03-01), Nishi
patent: 5281996 (1994-01-01), Bruning et al.
patent: 5424552 (1995-06-01), Tsuji et al.
patent: 5635722 (1997-06-01), Wakamoto
patent: 5654553 (1997-08-01), Kawakubo et al.
patent: 5699145 (1997-12-01), Makinouchi et al.
patent: 5739899 (1998-04-01), Nishi
patent: 5822043 (1998-10-01), Ebinuma
patent: 5828573 (1998-10-01), Hayashi

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