Scanning exposure method

Details Scanning exposure method Scanning exposure method

1994-11-21

1997-04-01

Crimley, Arthur T.

Photocopying

Projection printing and copying cameras

Step and repeat

355 51, 355 77, G03B 2753, H01L 21027

Patent

active

056171820

ABSTRACT:
A step-and-scan exposure method in which a mask has a plurality of patterns and the number of patterns to be transferred to each shot area of a photosensitive substrate varies. The scanning and stepping movements are controlled in accordance with the number of patterns transferred, and dimensions of a pattern illumination area are varied in accordance with the patterns to be transferred. Transfer of a pattern to a shot area is omitted when an image of the pattern on the shot area would extend beyond the photosensitive substrate. Elimination of exposure scanning movements for patterns that are not to be transferred permits rapid movements of the mask and the substrate to scanning start positions.

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patent: 5291240 (1994-03-01), Jain
patent: 5305054 (1994-04-01), Suzuki et al.

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