Scanning exposure apparatus, manufacturing method thereof,...

Details Scanning exposure apparatus, manufacturing method thereof,... Scanning exposure apparatus, manufacturing method thereof,...

2006-12-26

2006-12-26

Kim, Peter B. (Department: 2851)

Photocopying

Projection printing and copying cameras

Step and repeat

C355S055000, C355S077000, C355S075000

Reexamination Certificate

active

07154581

ABSTRACT:
A scanning exposure apparatus includes a master stage which holds a master and moves in a predetermined scanning direction, a projection optical system which projects a pattern of the master onto a substrate, and an optical element which is held by the master stage and moved together with the master. The optical element is so constituted as to optically correct a shift of the master held by the master stage from an ideal state.

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Japanese Office Action dated Aug. 29, 2005, issued in corresponding Japanese patent application No. 2002-001603.

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