Photocopying – Projection printing and copying cameras – Step and repeat
Patent
1995-06-14
1997-02-11
Grimley, Arthur T.
Photocopying
Projection printing and copying cameras
Step and repeat
355 54, 355 60, 356400, 356401, G03B 2742, G01B 1100
Patent
active
056026200
ABSTRACT:
The present invention is directed to scanning exposure apparatus and exposure method to achieve simultaneous projection of images of plural regions on a mask onto a photosensitive substrate with correcting an orthogonality error of a pattern on the mask or photosensitive substrate. If the pattern on the mask or photosensitive substrate has an orthogonality error causing a deviation of a certain angle in a first direction perpendicular to a scanning direction as it goes in the scanning direction, the mask and the photosensitive substrate are rotated relative to each other in the plane thereof to align one coordinate axis in a coordinate system of each pattern with the first direction. Then a relative displacement is given by an amount of the orthogonality error between positions of images projected through a first optical system and positions of images projected through a second optical system, and relative positions of the mask and the photosensitive substrate are continuously changed by the amount of the orthogonality error in the first direction in accordance with the position of the mask or photosensitive substrate in the scanning direction.
REFERENCES:
patent: 5440397 (1995-08-01), Ono et al.
patent: 5506684 (1996-04-01), Ota et al.
patent: 5528027 (1996-06-01), Mizutani
Miyazaki Seiji
Nara Kei
Seki Masami
Yanagihara Masamitsu
Grimley Arthur T.
Kerner Herbert V.
Nikon Corporation
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