Scanning exposure apparatus and device manufacturing method

Details Scanning exposure apparatus and device manufacturing method Scanning exposure apparatus and device manufacturing method

2007-01-02

2007-01-02

Kim, Peter B. (Department: 2851)

Photocopying

Projection printing and copying cameras

Step and repeat

C355S055000, C355S072000

Reexamination Certificate

active

10968046

ABSTRACT:
A scanning exposure apparatus includes a projection optical system, a stage to move while holding a substrate, a measurement system to measure a position of the substrate in an optical axis direction of the projection optical system, a generation system to generate a driving signal, in which a change amount being controlled to be equal to or less than an upper limit value, to the stage based on the result of measurement by the measurement system, and a setting system to set the upper limit value based on a running status of the stage.

REFERENCES:
patent: 5917580 (1999-06-01), Ebinuma et al.
patent: 6043500 (2000-03-01), Akimoto
patent: 6359688 (2002-03-01), Akimoto et al.
patent: 6567154 (2003-05-01), Akimoto
patent: 10-097987 (1998-04-01), None

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