Scanning exposure apparatus, and device manufacturing method

Details Scanning exposure apparatus, and device manufacturing method Scanning exposure apparatus, and device manufacturing method

2006-12-12

2006-12-12

Rutledge, D. (Department: 2851)

Photocopying

Projection printing and copying cameras

Identifying, composing, or selecting

C355S055000, C355S059000, C355S071000, C355S077000

Reexamination Certificate

active

07148948

ABSTRACT:
A scanning exposure apparatus includes an illumination optical system for illuminating a pattern of an original through an opening being conjugate or approximately conjugate with the pattern of the original, and a changing mechanism for changing a width of the opening with respect to a scan direction of the original. The changing mechanism includes a light blocking plat, and a plurality of driving mechanisms for moving the light blocking plate. The plurality of driving mechanisms is provided at different positions with respect to the light blocking plate and also are arranged to be driven by an actuator. At least one of the plurality of driving mechanisms includes a guiding mechanism for allowing a deviation between a position of an object to be driven by the actuator and a position of the light blocking plate, with respect to a direction different from a direction of displacement of the object to be driven.

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