Scanning exposure apparatus

Details Scanning exposure apparatus Scanning exposure apparatus

1997-09-29

1999-12-28

Mathews, Alan A.

Photocopying

Projection printing and copying cameras

Illumination systems or details

355 53, G03B 2754, G03B 2742

Patent

active

060088850

ABSTRACT:
A scanning exposure apparatus includes a light source, an illumination optical system for forming a secondary light source with light from the light source, and for illuminating a portion of a reticle having a pattern, a projection optical system for projecting the pattern of the reticle as illuminated, onto a wafer, a reticle stage for supporting the reticle and for scanningly moving the reticle in a predetermined scan direction, relative to the projection optical system, a wafer stage for supporting the wafer and for scanningly moving the wafer relative to the projection optical system, and a base for supporting the reticle stage and being supported by dampers, wherein the illumination optical system is divided into a first portion being supported by the base and a second portion supported by a floor, independently from the base, and wherein the predetermined direction of the reticle stage is substantially or approximately parallel to an optical axis direction at a location where the illumination optical system is divided.

REFERENCES:
patent: 4583840 (1986-04-01), Yabu et al.
patent: 4724466 (1988-02-01), Ogawa et al.
patent: 5128975 (1992-07-01), Iwamoto et al.
patent: 5194893 (1993-03-01), Nishi
patent: 5204711 (1993-04-01), Takubo et al.
patent: 5281996 (1994-01-01), Bruning et al.
patent: 5467720 (1995-11-01), Korenaga et al.
patent: 5508518 (1996-04-01), Kendall
patent: 5574537 (1996-11-01), Ozawa
patent: 5706076 (1998-01-01), Takeda
patent: 5721606 (1998-02-01), Jain
patent: 5739899 (1998-04-01), Nishi et al.
patent: 5742376 (1998-04-01), Makinouchi
patent: 5798838 (1998-08-01), Taniguchi et al.

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