Scanning exposure apparatus

Details Scanning exposure apparatus Scanning exposure apparatus

1995-06-15

1997-10-14

Grimley, Arthur T.

Photocopying

Projection printing and copying cameras

Step and repeat

355 50, 355 55, 355 67, 396118, G03B 2742, H01L 2130

Patent

active

056777540

ABSTRACT:
A reticle is scanned in a predetermined direction relative to an illumination field of a predetermined shape. In synchronism therewith, a shot-area defined on a photo-sensitive substrate (or wafer) is scanned in the opposite direction relative to an exposure field which is optically conjugate to the illumination field. Through these scanning operations, a pattern formed on the reticle is transferred onto the shot-area on the photosensitive substrate. The illuminance of an illumination light is measured during a time period when the illumination field is in an acceleration region and before reaching the shot-area, and the amount of exposure onto the shot-area is controlled based on the results of the measurement. In this manner, the amount of exposure onto the photosensitive substrate can be controlled to the correct amount of exposure even when the illuminance of the illumination light for exposure tends to vary in a relatively short interval, while a reduction in the throughput of the exposure process can be prevented.

REFERENCES:
patent: 4924257 (1990-05-01), Jain
patent: 5194893 (1993-03-01), Nishi
patent: 5227839 (1993-07-01), Allen
patent: 5255051 (1993-10-01), Allen
patent: 5281996 (1994-01-01), Bruning et al.
patent: 5285236 (1994-02-01), Jain
patent: 5291240 (1994-03-01), Jain
patent: 5567928 (1996-10-01), Sano

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