Scanning exposure apparatus

Details Scanning exposure apparatus Scanning exposure apparatus

1997-04-18

1999-11-16

Mathews, Alan A.

Photocopying

Projection printing and copying cameras

Step and repeat

355 72, 248550, 248638, G03B 2742, F16M 1300

Patent

active

059867434

ABSTRACT:
Provided is a reaction force isolator for an apparatus having a support installed on an installation surface and a movable body on the support, movement of the movable body generating a reaction force within the support. The reaction force isolator includes a movement sensor outputting a movement signal indicating movement of the movable body relative to the support; an actuator having a fixed portion connected to the installation surface and a movable portion connected to the support; and a control unit processing the movement signal to output an actuation signal to the actuator so that the actuator exerts a force on the support to offset the reaction force, the control unit providing an inhibit signal to disable the actuator when the movement signal indicates that the movable body is moving at a substantially constant velocity relative to the support.

REFERENCES:
patent: 5172160 (1992-12-01), Eijk et al.
patent: 5446519 (1995-08-01), Makinouchi
patent: 5610686 (1997-03-01), Osanai
patent: 5812420 (1998-09-01), Takahashi

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