Scanning exposure apparatus

Details Scanning exposure apparatus Scanning exposure apparatus

1995-06-20

1997-04-15

Grimley, Arthur T.

Photocopying

Projection printing and copying cameras

Illumination systems or details

355 53, 355122, 355 50, 359628, 356363, G03B 2754

Patent

active

056214995

ABSTRACT:
A scanning system includes an illuminating device for illuminating an object with coherent illumination light, and a scanning device for relatively and scanningly moving the object relative to the illumination light, along a scan direction, wherein the illuminating device is arranged so that a direction of interference fringe to be produced on the object by the illumination light is inclined with respect to the scan direction.

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patent: 5251067 (1993-10-01), Kamon
patent: 5335044 (1994-08-01), Shiraishi
patent: 5345292 (1994-09-01), Shiozawa et al.
patent: 5459547 (1995-10-01), Shiozawa

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