Scanning electron microscopy by photovoltage contrast imaging

Details Scanning electron microscopy by photovoltage contrast imaging Scanning electron microscopy by photovoltage contrast imaging

1989-05-18

1990-02-20

Karlsen, Ernest F.

Electricity: measuring and testing

Measuring, testing, or sensing electricity, per se

With rotor

250311, 2504922, 324158D, G01R 3128, G01R 3126

Patent

active

049029673

ABSTRACT:
A process and apparatus are disclosed for remotely determining electrical properties of a semiconductor. A surface of the semiconductor is simultaneously irradiated with an electron beam to generate secondary electrons from the irradiated surface and with a modulated light beam. Secondary electrons emitted by the semiconductor are filtered by an electron energy analyzer. An electron detector receives the filtered electrons and provides an output corresponding to electrical properties of the irradiated area. The output is provided to a computer which calculates the difference in output between periods when the semiconductor is being illuminated with the light beam and when it is not so illuminated. The time dependence of the output may also be measured.

REFERENCES:
patent: 3939415 (1976-02-01), Terasawa
patent: 4581534 (1986-04-01), Todokoro et al.
patent: 4695794 (1987-09-01), Bargett et al.
patent: 4704576 (1987-11-01), Tributsch et al.
Menzel et al; "Secondary Electron . . . "; Scanning; vol. 5; pp. 151-171; 83.

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