Scanning electron microscope with eddy-current compensation

Details Scanning electron microscope with eddy-current compensation Scanning electron microscope with eddy-current compensation

1977-10-13

1978-11-14

Dixon, Harold A.

Radiant energy

With charged particle beam deflection or focussing

Magnetic lens

250311, G21K 108

Patent

active

041257723

ABSTRACT:
In a scanning charged particle microprobe such as a scanning electron microscope, means for generating an exponentially decaying electrical signal and means for generating a step function signal to be summed and applied to the microprobe to cause it to deflect in a step function compensated for the effects of eddy current induced fields.

REFERENCES:
patent: 2617041 (1952-11-01), Fleming
patent: 3371206 (1968-02-01), Takizawa
Deflection Signal Generator for Electron Machines by Lindsay et al., "Microelectronics & Reliability," Pergamon Press, vol. 9, No. 4, pp. 345-347.

Affiliated with

Also associated with

Rating

Scanning electron microscope with eddy-current compensation does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Scanning electron microscope with eddy-current compensation, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Scanning electron microscope with eddy-current compensation will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-1303582