Scanning electron microscope with an optical microscope

Details Scanning electron microscope with an optical microscope Scanning electron microscope with an optical microscope

1983-03-02

1985-08-27

Punter, William H.

Radiant energy

Ionic separation or analysis

Static field-type ion path-bending selecting means

250310, 350523, 350529, G02B 2100, G02B 2106, G02B 2126, H01J 3726

Patent

active

045374775

ABSTRACT:
A scanning electron microscope has a specimen chamber in which there are mounted a specimen moving mechanism and an optical microscope for observing a transmission optical image of a specimen. The optical microscope includes an objective lens unit and an eyepiece unit mounted on a cover of the specimen chamber, to which the specimen moving mechanism is also attached. This arrangement facilitates switching between various modes of specimen observation on the scanning electron microscope.

REFERENCES:
patent: 3346736 (1967-10-01), Neuhaus
patent: 3848126 (1974-11-01), Swindells et al.
patent: 4349242 (1982-09-01), Ogura
patent: 4440475 (1984-04-01), Colliaux

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