Radiant energy – With charged particle beam deflection or focussing – With detector
Reexamination Certificate
2003-10-22
2010-12-07
Johnston, Phillip A (Department: 2881)
Radiant energy
With charged particle beam deflection or focussing
With detector
C250S307000, C250S310000
Reexamination Certificate
active
07847267
ABSTRACT:
A system and method for multi detector detection of electrons, the method includes the steps of directing a primary electron beam, through a column, to interact with an inspected object, directing, by introducing a substantial electrostatic field, electrons reflected or scattered from the inspected objects towards multiple interior detectors, whereas at least some of the directed electrons are reflected or scattered at small angle in relation to the inspected object; and receiving detection signals from at least one interior detector.
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Adamec Pavel
Shemesh Dror
Applied Materials Israel, Ltd.
Johnston Phillip A
SNR Denton US LLP
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