Scanning electron microscope based parametric testing method and

Details Scanning electron microscope based parametric testing method and Scanning electron microscope based parametric testing method and

1990-05-25

1991-10-01

Wieder, Kenneth A.

Electricity: measuring and testing

Measuring, testing, or sensing electricity, per se

With rotor

324 731, 324158D, 250306, G01R 3128

Patent

active

050536990

ABSTRACT:
A scanning electron microscope (SEM) (24), or other irradiating device, is used to create a potential in sample areas (39b) of a test structure (39) formed on the surface of an integrated circuit wafer. A conduction path between the irradiated sample area and a common area (39a) is detected via an ammeter (40) connected between the sample area (39b) and a voltage source (42). Monitoring circuit (44) produces an output indicative of those sample areas (39b) which are electrically coupled to the common area (39a).

REFERENCES:
patent: 4581578 (1986-04-01), Honma et al.
patent: 4629898 (1986-12-01), Orloff et al.
patent: 4755748 (1988-07-01), Lin
patent: 4871919 (1989-10-01), Donohue et al.
patent: 4918309 (1950-04-01), Beha et al.
Aton, T., Garth, S. C. J., Sackett, J. N., and Spicer, D. F.; Characteristics of a Virtual Immersion Lens Spectrometer for Electron Beam Testing. J. Vac. Sci. Technol. B 6(6), Nov./Dec. 1988, pp. 1953-1957.

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